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DYNAX 65AX-089 Wafer Transfer Robot Set, 320mm Module

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The Dynax 65AX-089 Wafer Transfer Robot Set, 320mm, is an advanced automation solution designed for efficient and precise wafer handling in semiconductor manufacturing. This set ensures optimal transfer of wafers across different processing stations with minimal error and maximum throughput.

SKU: 2748575
Phone: +86 19066591275
Email: abbdcs36@gmail.com
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Robot Arm Length:320mm

Load Capacity:Up to 15kg

Max Movement Speed:200mm/sec

Accuracy:±0.01mm

Robust Construction Material:High-grade aluminum alloy

Temperature Resistance:-20°C to +80°C

Power Supply:220V AC

Operating Range:360-degree rotation

    The Dynax 65AX-089 Wafer Transfer Robot Set is specifically engineered for the seamless handling of wafers within the semiconductor industry. Its advanced design ensures precise and efficient transfer, minimizing the risk of damage and optimizing production throughput.

    Featuring a versatile arm span of 320mm, this robot set is perfectly suited for a wide range of tasks in the manufacturing process, from wafer loading to transfer to inspection stations.

    With a maximum load capacity of up to 5kg, it can handle various wafer sizes and types with ease. The variable operating speed and high precision positioning capability (±0.05mm) ensure both safety and accuracy in every operation.

    Equipped with an efficient power supply system and an EtherCAT control system, the Dynax 65AX-089 facilitates seamless integration into existing factory automation networks. Its communication protocol, Modbus TCP/IP, allows for robust data exchange with other systems.

    Notably, this robot set is designed with durability in mind. Its compact yet robust structure, weighing approximately 120kg, ensures stable operation under demanding conditions. Moreover, it is designed to operate within a wide temperature range (0°C to 40°C) and withstand moderate humidity levels (10% to 80% RH), making it suitable for a variety of industrial environments.

DYNAX 65AX-089 WAFER TRANSFER ROBOT SET 320MM




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    About Us----Greens Automation

    We are a leading supplier in the industrial automation industry, specializing in providing high-quality DCS, PLC, robotic control systems, and large servo system spare parts. With a comprehensive range of products and a commitment to excellence, we empower businesses to achieve smarter, more efficient operations through cutting-edge automation solutions.

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